Getting My Noohapou To Work
Getting My Noohapou To Work
Blog Article
Remote areas: Static units are typically located remotely, expanding Value and reducing Total method performance.
30% of its peak electrical power intake, presenting our buyers significant reduction in functioning charges and elevated dependability.
With the POU3500, you may realize unprecedented ends in etch functionality, chamber uptime, diminished cost of possession and fab Place utilization – all although improving upon your system dependability.
We embrace particular accountability and settle for accountability for prudent possibility using. We encourage individual values, which guide us to continually meet the commitments we make and we endeavor to deal with Those people with whom we communicate with respect as we wish to be dealt with ourselves.
This extraordinary process, giving a little kind element, cheap-of-possession and Dynamic Temperature Regulate presented method and devices engineers a fresh tool to optimize their temperature sensitive procedures.
we've been guided within our perception that prosperity During this competitive industry stems from offering prospects with highly engineered new products and earth course customer service.
The accuracy with the POU 3500 permits unbiased control of the process fluid temperature to your wafer chuck within +/- 0.1 °C of set place, as well as the speedy response time in the procedure enables for maximum wafer-to-wafer repeatability through the etch course of action.
Together with the POU3300, it is possible to obtain unparalleled brings about etch performance, chamber uptime, reduced expense of ownership and fab Area utilization – all while improving your approach trustworthiness.
the information pertains to the 300mm chamber temperature profile through a high element ratio Etch procedure, running at pretty substantial RF electricity circumstances (~3.8kW). The powerful facets of this facts set are:
Dynamic Temperature Management, as applied in techniques like the LAUDA-Noah POU, is an approach that senses the temperature of the process fluid returning Noohapou from the method chamber’s wafer chuck (ESC) and dynamically adjusts the temperature on the provided process fluid depending on this true-time suggestions.
The TEs' can change directly from heating to cooling, or visa-versa. they might turn on & off though inside the heating or cooling method and might increase or lower the amount of heating or cooling without the need of switching in any way.
The POU3300 process delivers dynamic temperature control of the procedure chamber cathode / electrode / anode and might be synchronized with any etch approach.
Confirmed; TEs' symbolize just one Component of a chiller's layout. The switching & Manage strategies utilized by a chiller will impression the TEs' trustworthiness.
observing totally free movies online is a practical and frugal approach to see the films you like correct from your ease and comfort of your very own property.
We recognize that wonderful solutions are often the results of excellent purchaser comments and the application of ground breaking technological innovation. We attempt to generate value for our shoppers through a method that lets the customer impact our objectives, goals, merchandise developments and business techniques.
Report this page